Challenges in 1 Teradot∕in.[sup 2] dot patterning using electron beam lithography for bit-patterned media
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- 2007
- DOI:
- 10.1116/1.2798711
- Bibcode:
- 2007JVSTB..25.2202Y