A MEMS-Based Ionization Gas Sensor Using Carbon Nanotubes Hou, Zhongyu ; Wu, Jiahao ; Zhou, Weimin ; Wei, Xing ; Xu, Dong ; Zhang, Yafang ; Cui, Bingchu Abstract Publication: IEEE Transactions on Electron Devices Pub Date: June 2007 DOI: 10.1109/TED.2007.896370 Bibcode: 2007ITED...54.1545H