Characterization of a-SiC:H as Masking Material in MEMS Applications Reyes-Betanzo, C. ; Zuñiga-Islas, C. ; Pérez-Trejo, A. ; Rosas-Guevara, G. ; Itzmoyotl-Toxqui, A. ; Calleja-Arriaga, W. ; Torres-Jácome, A. Abstract Publication: ECS Transactions Pub Date: November 2007 DOI: 10.1149/1.2813480 Bibcode: 2007ECSTr...4a..93R