Micro-Scanning Electron Microscope and X-ray Spectrometer for Planetary Exploration
Abstract
Scanning Electron Microscopy combined with electron-induced X-ray Fluorescence Spectroscopy (SEM-EDX) is one of the most powerful techniques for characterizing surface morphology and composition with spatial resolution of a micrometer or better. SEM-EDX can elucidate natural processes such as low-temperature diagenesis, thermal or pressure induced metamorphism, volcanism/magmatism, atmosphere/crust interaction and the like. This information is useful for the investigation of the natural history of solar system objects. We are developing a prototype micromachined scanning electron microscope with X-ray spectrometer (MSEMS) for solar system exploration. The MSEMS is comprised of a carbon nanotube field emission (CNTFE) electron source integrated with a micro-electro-mechanical-system (MEMS) based electron gun and electron optics structure. The MSEMS system will utilize a piezoelectric sample stage, having scan ranges from a few angstroms to several hundreds of microns. Compared with conventional electron sources, the CNTFE source offers advantages of low power usage, ultra-small source size and simplicity of electrostatic focusing. The MSEMS instrument, including CNTFE source, MEMS electron optic column and piezoelectric sample stage, is envisioned to be 1-2 cm in height and will operate in the range of 500 eV to 15 KeV. The imaging resolution of MEMS is predicted to be ~10 nm at 5 KeV and the spatial resolution of the X-ray spectrometer will be ~1 μm at 15 KeV. We will present field emission data from our CNTFE source as well as the MEMS electron gun and piezostage designs.
- Publication:
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AGU Fall Meeting Abstracts
- Pub Date:
- December 2007
- Bibcode:
- 2007AGUFM.P21A0227B
- Keywords:
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- 0406 Astrobiology and extraterrestrial materials;
- 5494 Instruments and techniques;
- 6094 Instruments and techniques;
- 6297 Instruments and techniques