Successive deposition of layered titanium oxide/indium tin oxide films on unheated substrates by twin direct current magnetron sputtering
Abstract
- Publication:
-
Thin Solid Films
- Pub Date:
- April 2006
- DOI:
- 10.1016/j.tsf.2005.11.035
- Bibcode:
- 2006TSF...500..110W