Pattern noise in electron beam resists: PMMA, KRS-XE, TOK, HSQ
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- November 2006
- DOI:
- 10.1116/1.2393248
- Bibcode:
- 2006JVSTB..24.3025M