Characteristics and Modeling of Sub-10-nm Planar Bulk CMOS Devices Fabricated by Lateral Source/Drain Junction Control
Abstract
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- September 2006
- DOI:
- 10.1109/TED.2006.880169
- Bibcode:
- 2006ITED...53.1961W