Modern approaches in phase measuring metrology (Invited Paper)
Abstract
The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and a special form of spatial carrier interferometry utilizing a micropolarizer phase-shifting array. In both techniques averaging can be used to reduce the effects of turbulence and the normal double frequency errors generally associated with phase-shifting interferometry.
- Publication:
-
Optical Measurement Systems for Industrial Inspection IV
- Pub Date:
- June 2005
- DOI:
- 10.1117/12.621581
- Bibcode:
- 2005SPIE.5856...14M