Synthesis of Poly[N-(1-adamantyl)vinylsulfonamide-co- 2-(2-methyl)adamantyl methacrylate] for 193 nm Lithography Fukuhara, Toshiaki ; Shibasaki, Yuji ; Ando, Shinji ; Kishimura, Shinji ; Endo, Masayuki ; Sasago, Masaru ; Ueda, Mitsuru Abstract Publication: Macromolecules Pub Date: April 2005 DOI: 10.1021/ma0477798 Bibcode: 2005MaMol..38.3041F