Nanoindentation technique for characterizing cantilever beam style RF microelectromechanical systems (MEMS) switches
Abstract
A nanoindentation technique was used to mechanically actuate a radio frequency micro-switch along with the measurement of contact resistance to investigate its applicability to characterize deflection and contact resistance behaviors of micro-sized cantilever beam switches. The resulting load-displacement relationship showed a discontinuity in slope when the micro-switch closed. The measured spring constants reasonably agreed with theoretical values obtained from the simple beam models. The change in contact resistance during test clearly indicated micro-switch closure but it did not coincide exactly with the physical contact between two electric contacts due to a resistive contaminated film.
The views expressed in this paper are those of the authors and do not reflect the official policy or position of the United States Air Force, Department of Defense, or the US Government.- Publication:
-
Journal of Micromechanics and Microengineering
- Pub Date:
- June 2005
- DOI:
- 10.1088/0960-1317/15/6/013
- Bibcode:
- 2005JMiMi..15.1230L