High-performance, tensile-strained Ge p-i-n photodetectors on a Si platform

We demonstrate a high-performance, tensile-strained Ge p-i-n photodetector on Si platform with an extended detection spectrum of 650-1605 nm and a 3 dB bandwidth of 8.5 GHz measured at λ =1040nm. The full bandwidth of the photodetector is achieved at a low reverse bias of 1 V, compatible with the low driving voltage requirements of Si ultralarge-scale integrated circuits. Due to the direct bandgap shrinkage induced by a 0.20% tensile strain in the Ge layer, the device covers the entire C band and a large part of the L band in telecommunications. The responsivities of the device at 850, 980, 1310, 1550, and 1605 nm are 0.55, 0.68, 0.87, 0.56, and 0.11A/W, respectively, without antireflection coating. The internal quantum efficiency in the wavelength range of 650-1340 nm is over 90%. The entire device was fabricated using materials and processing that can be implemented in a standard Si complementary metal oxide semiconductor (CMOS) process flow. With high speed, a broad detection spectrum and compatibility with Si CMOS technology, this device is attractive for applications in both telecommunications and integrated optical interconnects.