Control of crystal orientation in YBCO thin films by an oxygen diffusion process
Abstract
We report the orientation control of Y Ba2Cu3O7-x (YBCO) thin films with high crystallinity, high critical temperature (Tc) and narrow transition width (DgrTc). YBCO thin films with c-axis orientation, a-axis orientation and (110) orientation are prepared by deposition on SrTiO3 (100) and (110) substrates using a dc magnetron sputtering system. No post-annealing process is introduced. With decreasing deposition rate (Rd), Tc increases and DgrTc narrows, which suggests a linear relation between Rd and the oxygen diffusion coefficient. We conclude that molecular oxygen is effectively taken into the film during the sputtering process by the acquiring of the activation energy of 0.96 eV, as oxygen diffusion.
- Publication:
-
Superconductor Science Technology
- Pub Date:
- April 2004
- DOI:
- 10.1088/0953-2048/17/4/004
- Bibcode:
- 2004SuScT..17..592U