Combined PIC MCC approach for fast simulation of a radio frequency discharge at a low gas pressure
Abstract
A new combined particle-in-cell Monte Carlo collisions (PIC-MCC) approach has been developed for accurate and fast simulation of a radio frequency (rf) discharge at a low gas pressure and high plasma density. Test calculations of heating mode transition in a capacitively coupled rf discharge in helium and argon show a good agreement with experimental data. We demonstrate a high efficiency of the combined PIC-MCC algorithm, especially for the collisionless regime of electron heating.
- Publication:
-
Plasma Sources Science Technology
- Pub Date:
- May 2004
- DOI:
- 10.1088/0963-0252/13/2/018
- arXiv:
- arXiv:physics/0308071
- Bibcode:
- 2004PSST...13..315S
- Keywords:
-
- Physics - Plasma Physics
- E-Print:
- 6 paged, 8 figures