Si diffusion in p-GaN Pan, C. J. ; Chi, G. C. ; Pong, B. J. ; Sheu, J. K. ; Chen, J. Y. Abstract Publication: Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures Pub Date: July 2004 DOI: 10.1116/1.1767826 Bibcode: 2004JVSTB..22.1727P