HEIGHTS initial simulation of discharge produced plasma hydrodynamics and radiation transport for extreme ultraviolet lithography
Abstract
- Publication:
-
Journal of Micro/Nanolithography, MEMS, and MOEMS
- Pub Date:
- January 2004
- DOI:
- 10.1117/1.1631445
- Bibcode:
- 2004JMM&M...3..130H