Diamond-like carbon films: electron spin resonance (ESR) and Raman spectroscopy
Abstract
Tetrahedral diamond-like carbon (ta-C) films and hydrogenated a-C:H films were deposited onto Si substrates using filtered cathodic vacuum arc (FCVA) process and direct ion beam deposition from CH 4/C 2H 4 plasma, respectively. Stress of deposited films was varied in the range 2.8-8.5 GPa depending on deposition conditions. Stationary and pulse electron spin resonance (ESR), and Raman spectroscopy techniques were used to analyze sp 2 related defects in pseudo-gap of undoped as deposited and annealed 20-100 nm thick films.
- Publication:
-
Diamond and Related Materials
- Pub Date:
- 2004
- DOI:
- 10.1016/j.diamond.2004.01.010
- Bibcode:
- 2004DRM....13.1592D
- Keywords:
-
- Diamond-like ta-C and a-C:H films;
- Stress;
- Electronic and paramagnetic states;
- Electron spin resonance;
- Raman spectroscopy;
- sp <SUP>2</SUP>-bonding;
- sp <SUP>3</SUP>-bonding