Optical Energy Gap in Amorphous/Microcrystalline Silicon Prepared by DC Saddle-Field Glow Discharge Method
Abstract
The DC Saddle Field Glow Discharge Method shows the potential to make the mass production of thin film photovoltaic cells economically feasible. It allows independent control of plasma parameters and and substrate bias. The substrate is electrically isolated and films are grown using silane diluted with hydrogen. Using profilometry, film thickness on a series of samples was measured to be between .4 and 1.1 microns. The films were characterized using FTIR and UV/VIS spectroscopy, and the optical energy gap was determined to be 1.75-2.04 eV.
- Publication:
-
APS Southeastern Section Meeting Abstracts
- Pub Date:
- November 2004
- Bibcode:
- 2004APS..SES.CD001W