Wide Wavelength Range Tunable Fabry-Perot Filter for gas Measurement
Abstract
An electrostatically driven tunable Fabry-Perot filter with wide wavelength range from 2.5 µm to 4.5 µm has been developed by silicon-CMOS-compatible and MEMS fabrication process. For the movable mirror, we adopted a three-layer membrane which consists of polycrystalline silicon, silicon nitride and polycrystalline silicon. To optimize the mechanical characteristics of the membrane, such that the membrane stress and the driving voltage, as well as to optimize the optical characteristics, the thickness of the membrane and annealing temperatures are designed such that the top and bottom layers have opposite stress to the middle layer. This paper describes the optical and mechanical designs, fabrication process and results of evaluating the fabricated devices.
- Publication:
-
IEEJ Transactions on Sensors and Micromachines
- Pub Date:
- 2003
- DOI:
- 10.1541/ieejsmas.123.392
- Bibcode:
- 2003IJTSM.123..392S
- Keywords:
-
- tunable Fabry-Perot filter;
- three layer membrane;
- anneal;
- membrane stress;
- large deformation