Er:Y 2O 3 thin films grown by pulsed laser deposition
Abstract
Deposition of thin films by pulsed laser ablation from an Er 2O 3:Y 2O 3 ceramic target for waveguide laser application is reported. Erbium-doped yttrium oxide (Er:Y 2O 3) thin films are grown on c-cut sapphire under optimized deposition parameters. The effects of ultraviolet (UV)-assisted annealing of thin Er:Y 2O 3 films on the structural properties and the morphology are investigated. The films exhibit better crystalline structure and smoother surface after post-deposition treatment. The optical transmission spectra and the waveguiding properties of the thin films are reported. The films exhibit lower absorption and scattering losses after UV-assisted annealing. The light is guided to the end of the treated films with propagation losses ≈2 dB/cm.
- Publication:
-
Vacuum
- Pub Date:
- January 2002
- DOI:
- 10.1016/S0042-207X(02)00344-5
- Bibcode:
- 2002Vacuu..69..273D
- Keywords:
-
- Pulsed laser deposition;
- UV-assisted annealing;
- Doped Y <SUB>2</SUB>O <SUB>3</SUB>;
- Optical thin films