DESIGN NOTE: Solid state gas sensors based on tunnel junction geometry
Abstract
We present preliminary results concerning the design and testing of solid state gas sensors for sulphur dioxide. The detector design is based on metal-insulator-metal tunnel junction geometry, and in our proof of the concept case we use vacuum evaporation techniques to form Al-Al2O3-Au structures. We monitor changes in the DC and AC characteristics of these devices due to exposure to small quantities of SO2 gas in a high-vacuum test stand designed for this purpose. Our results indicate that the electrical properties of these devices can be used in a detection scheme for integrated exposure to sulphur dioxide. These detectors are technologically attractive since they are inexpensive to fabricate and disposable after use.
- Publication:
-
Measurement Science and Technology
- Pub Date:
- June 2002
- Bibcode:
- 2002MeScT..13N..57D