Large tilt angle electrostatic force actuated micro-mirror Kim, Tae-Sik ; Lee, Sang-Shin ; Yee, Youngjoo ; Bu, Jong-Uk ; Park, Chil-Geun ; Ha, Man-Hyo Abstract Publication: IEEE Photonics Technology Letters Pub Date: November 2002 DOI: 10.1109/LPT.2002.803913 Bibcode: 2002IPTL...14.1569K