Anomalous Current in Scanning Probe Nanolithography
Abstract
We report the observation of anomalously high currents (up to 10 microamps) during direct oxide nanolithography on the surface of p-type silicon 100. Conventional nanolithography with the atomic force microscope (AFM) normally involves currents on the order of femtoamps and is usually attributed to ionic conduction within a water meniscus surrounding the tip. Our current-voltage measurements indicate a threshold bias voltage at which the anomalous Ohmic behavior begins. One possible reason for such a high current is the electrical breakdown in the meniscus resulting in conduction dominated by electrons rather than ions. The high energy density associated with the local electric field in the vicinity of the AFM tip is responsible for this effect. A potential application of this effect is a new principle based on a combination of nanolithography and optical holography: nanoholography. The basic premise of nanoholography is to use the interference of electrons from AFM tips to record holograms on surfaces, thus significantly improving the speed at which we can create nanostructures.
- Publication:
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APS March Meeting Abstracts
- Pub Date:
- March 2002
- Bibcode:
- 2002APS..MARP33215R