The Role of Nitrogen in the Formation of Luminescent Silicon Nanoprecipitates during Heat Treatment of SiO2 Layers Implanted with Si+ ions
Abstract
- Publication:
-
Semiconductors
- Pub Date:
- October 2001
- DOI:
- 10.1134/1.1410661
- Bibcode:
- 2001Semic..35.1182K