Effect of SR irradiation on In 2O 3 film
Abstract
The effect of SR irradiation on the crystal growth of indium oxide films prepared by electron-beam evaporation have been studied by X-ray diffraction and high-resolution electron microscopy. An as-deposited film showed In 2O 3 crystallites with a size of 2-10 nm. The crystallites were destroyed by SR irradiation under oxygen flow. SR irradiation without oxygen flow showed the growth of In 2O 3 crystallites up to 20 nm in size with accompanying deoxidation and indium-particle growth. The as-deposited film was composed of variously oriented particles. Periodic oxygen decomposition of the film preferentially took place on the (0 0 1)-oriented particle.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- July 2001
- DOI:
- 10.1016/S0168-9002(01)00618-0
- Bibcode:
- 2001NIMPA.467.1213H
