Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition Goswami, Jaydeb ; Wang, Chang-Gong ; Majhi, Prashant ; Shin, Yong-Wook ; Dey, Sandwip K. Abstract Publication: Journal of Materials Research Pub Date: August 2001 DOI: 10.1557/JMR.2001.0300 Bibcode: 2001JMatR..16.2192G