An organic functional group introduced to Si(1 1 1) via siliconcarbon bond: a liquid-phase approach
Abstract
We report a new liquid-phase route for alkylation of a Si surface. A Cl-terminated Si(1 1 1) surface was first prepared by UV-assisted chlorination of a H-terminated Si substrate in a PCl 5 solution. Alkylation was accomplished by a reaction of the surface SiCl groups with n-C 4H 9Li under reflux condition. We have found that the C 4H 9-terminated surface exhibits a respectable stability in air. This alkylation technique is not only simple but also effective to reduce carbon and oxygen contamination, as compared to previously reported liquid-phase processes. The SiC bonds thus formed expectedly serve as a bridge between a rich variety in organic chemistry and advanced silicon technology.
- Publication:
-
Applied Surface Science
- Pub Date:
- February 2001
- DOI:
- 10.1016/S0169-4332(00)00759-5
- Bibcode:
- 2001ApSS..171..252O