A thermodynamic model of the growth of diamond-like Carbon = Nitride film
Abstract
We suggest a greatly simplified model to describe the growth of β-C_3N_4, p- C_3N4 and -(C_2N_2)_n- via magnetron sputtering. In the model the key middle products in gas phase, CN and C_2N_2, are supposed to be produced on the target surface. They move directly to the substrate surface after being sputtered. Most possible chemical reactions on the substrate surface have been selected by chemical thermodynamics calculations. The growth conditions of the three products have been calculated. The results show that these three structures should grow simultaneously if one wants to get diamond-like Carbon Nitride. This conclusion may be consistent with the underlying experimental results.
- Publication:
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APS March Meeting Abstracts
- Pub Date:
- March 2001
- Bibcode:
- 2001APS..MARR40028S