Flexible large area thin film position sensitive detectors

Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma-enhanced chemical vapour deposition. The sensors have been characterised by spectral response, light intensity dependence and linearity measurements in a bent state in order to evaluate the properties in real working conditions. The obtained one-dimensional (1D) position sensors with 10 mm width and 20 mm length present a non-linearity of ±1% which are comparable to the ones produced on glass substrates.