Effect of Substrate Temperature on the Structural, Electrical and Optical Properties of ITO Films Prepared by RF Magnetron Sputtering
Abstract
Available from http://www3.interscience.wiley.com/cgi- bin/abstract/70000918/START
- Publication:
-
Physica Status Solidi Applied Research
- Pub Date:
- 2000
- DOI:
- 10.1002/(SICI)1521-396X(200002)177:2<445::AID-PSSA445>3.3.CO;2-E
- Bibcode:
- 2000PSSAR.177..445E