1,1-Dimethylhydrazine as a high purity nitrogen source for MOVPE-water reduction and quantification using nuclear magnetic resonance, gas chromatography-atomic emission detection spectroscopy and cryogenic-mass spectroscopy analytical techniques
Abstract
- Publication:
-
Journal of Electronic Materials
- Pub Date:
- January 2000
- DOI:
- 10.1007/s11664-000-0113-5
- Bibcode:
- 2000JEMat..29..161O