Electron Impact Ionization of TiClx(x=1-3)

Titaniumtetrachloride (TiCl4) is the precursor of choice for the plasma-assisted chemical vapor deposition of TiN. Any effort to understand and model the key plasma-chemical reactions in the deposition plasma requires a knowledge of the ionization properties of TiCl4 parent molecules and of the TiClx (x=1-3) free radicals that are produced in the plasma. We report the results of absolute ionization cross sections measurements for the TiClx (x=1-3) free radicals using the fast-beam technique. Dissociative ionization channels are the dominant ionization path ways for all TiClx free radicals. A complete account of the measured cross sections and appearance energies will be presented at the Conference together with a comparison of the measured cross sections with predictions from semi-classical and semi-empirical calculations.