Experiments with a helicon plasma source
Abstract
A plasma source has been operated both in the inductive and in the helicon modes. A helical six - turn antenna, of a total axial length 350 mm, radiates 13.56 MHz electromagnetic waves of a power up to 1kW into a cylindrical pyrex tube of a 60 cm length and 10 cm diameter. Three coils that surround the tube generate an axial DC magnetic field of intensity up to 1kG. The density change in the transition to the helicon mode is identified. The effect of tapering the axial magnetic field on the plasma density inside the source and in the adjacent vacuum vessel is studied. Also studied is the operation with various mass flow rates of Argon and Nitrogen. The effect of adding a radial DC electric field on the discharge is examined.
- Publication:
-
APS Division of Plasma Physics Meeting Abstracts
- Pub Date:
- October 2000
- Bibcode:
- 2000APS..DPPMP1005M