Pulsed laser deposition of (001) textured LiNbO 3 films on Al 2O 3/SiO 2/Si substrate
Abstract
On SiO 2/Si substrate (Si wafer with thermally oxidized SiO 2 coating), only polycrystalline LiNbO 3 thin films were normally obtained. In this work, we found that an ultrathin layer of predeposited Al 2O 3 layer on SiO 2/Si has greatly mediated the growth pattern of the subsequently deposited LiNbO 3 films. As a result, highly or completely (001) textured LiNbO 3 films were achieved depending on the substrate temperature and the thickness of Al 2O 3 as well. The textured growth phenomenon is discussed in terms of surface energy relation.
- Publication:
-
Applied Surface Science
- Pub Date:
- March 1999
- DOI:
- 10.1016/S0169-4332(98)00890-3
- Bibcode:
- 1999ApSS..141..197H