Reflectometer for precision tests of optical components in the ultrasoft X-ray range
Abstract
The design of a reflectometer for testing optical components within the range of 0.7-120 nm is described. The reflectometer covers all scanning regimes with a minimum step in θ of 9 angular seconds. The specimen can be moved across the X-ray beam within the limits of ±7.5 cm. The design of the apparatus envisages keeping the position of goniometer zeros after vacuum pumping. The reflectometer is designed for the study of diffraction gratings, and multilayer and grazing incident X-ray mirrors.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- February 1998
- DOI:
- 10.1016/S0168-9002(96)01051-0
- Bibcode:
- 1998NIMPA.405..393C