化学研磨したステンレス鋼のガス放出特性; 化学研磨したステンレス鋼のガス放出特性; Outgassing Properties of Chemically Polished Stainless Steels.
Abstract
- Publication:
-
Journal of the Vacuum Society of Japan
- Pub Date:
- 1998
- DOI:
- 10.3131/jvsj.41.96
- Bibcode:
- 1998JVSJ...41...96I