Micropatterning of BiSrCaCuO Thin Films Using Excimer Laser
Abstract
Micropatterning of BiSrCaCuO(BSCCO) superconducting thin films has been successfully accomplished by using a pulsed KrF excimer laser with a wavelength of λ=248 nm and a duration of 25 ns. The optimum energy density of the laser was 0.36 Jcm-2 for etching of these films. For example, a superconducting microstructure of BSCCO film with nominally 3 μm wide and 2 μm long, showed no degradation in Tc and Jc. Excimer laser patterning technique yields reproducible patterning without any degradation of superconducting properties. The etching bordering and surface morphology was examined using an atomic force microscope.
- Publication:
-
International Journal of Modern Physics B
- Pub Date:
- 1998
- DOI:
- 10.1142/S0217979298002830
- Bibcode:
- 1998IJMPB..12.3485H