Control of RF Sheath Structure in RF Diode Discharge Sato, N. Y. ; Iwama, M. ; Hashimoto, Y. ; Ikehata, T. ; Tanabe, T. ; Mase, H. Abstract Publication: Double Layers: Potential Formation and Related Nonlinear Phenomena in Plasmas Pub Date: 1997 Bibcode: 1997ldpf.book...59S