X-Ray Microbeam Techniques and Applications (Invited) Isaacs, E. D. ; Evans-Lutterodt, K. ; Marcus, M. A. ; MacDowell, A. A. ; Lehnert, W. ; Vandenberg, J. M. ; Sputz, S. ; Johnson, J. E. ; Grenko, J. ; Ketelsen, L. J. P. ; Pinzone, C. ; Glew, R. ; Yun, W. ; Cai, Z. ; Rodrigues, W. ; Lee, H. -R. ; Lai, B. Abstract Publication: Diagnostic Techniques for Semiconductor Materials and Devices Pub Date: 1997 Bibcode: 1997SPIE.3322...49I