Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 145–160-nm wavelength region Kowalski, M. P. ; Cruddace, R. G. ; Seely, J. F. ; Rife, J. C. ; Heidemann, K. F. ; Heinzmann, U. ; Kleineberg, U. ; Osterried, K. ; Menke, D. ; Hunter, W. R. Abstract Publication: Optics Letters Pub Date: June 1997 DOI: 10.1364/OL.22.000834 Bibcode: 1997OptL...22..834K