Interference microscopy of sub-λ structures: A rigorous computation method and measurements
Abstract
The topometrical images of sub-wavelength structures as obtained in interferometrical microscopy with partially coherent illumination are computed and compared with measurements. The developed numerical model consists of: (i) a moment method calculation of the electromagnetic near-field of small (width < λ), inhomogeneous, 2D-structures embedded in a layer that is surrounded on each side by an infinite medium, and (ii) a simulation of the phase stepping method for partially coherent imaging.
- Publication:
-
Optics Communications
- Pub Date:
- February 1997
- DOI:
- 10.1016/S0030-4018(96)00677-3
- Bibcode:
- 1997OptCo.136...61T