Novel method of nuclear microprobe beam profile determination
Abstract
A simple method to directly determine the nuclear microprobe beam profile is described. Whereas the accuracy of the method can be drastically reduced by the alignment of the test specimen, secondary electron emission was used to determine the precise specimen orientation. The resulting technique was used for both accurate beam size and profile determinations.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- July 1997
- DOI:
- 10.1016/S0168-583X(97)00216-4
- Bibcode:
- 1997NIMPB.130...70C