Large-area beryllium metal foils
Abstract
To manufacture beryllium filters having diameters up to 82 mm and thicknesses in the range 0.1-1 μm, it was necessary to construct apparatus in which the metal could safely be evaporated, and then to find an acceptable substrate and evaporation procedure. The metal was evaporated resistively from a tantalum dimple boat mounted in a baffled enclosure that could be placed in a conventional vacuum bell jar, obviating the need for a dedicated complete vacuum system. Substrates were 102 mm × 127 mm × 0.05 mm cleaved mica sheets, coated with 0.1 μm of NaCl, then with approximately 50 μg/cm 2 of cellulose nitrate. These were mounted on poly(methyl methacrylate) sheets 3 mm thick that were in turn clamped to a massive aluminum block for thermal stability. Details of the processes for evaporation, float off, and mounting are given, and the resulting foils described.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- February 1997
- DOI:
- 10.1016/S0168-9002(97)00373-2
- Bibcode:
- 1997NIMPA.397...68S