Extension of krypton fluoride excimer laser lithography to the fabrication of 0.18 µm devices
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- September 1997
- DOI:
- 10.1116/1.589532
- Bibcode:
- 1997JVSTB..15.1825O