Conductivity of amorphous diamond-like carbon films prepared by saddle field glow-discharge method
Abstract
a-C:H thin films have been grown using saddle-field glow-discharge technique in undiluted ultra-pure methane atmosphere on corning glass, quartz, and high resistivity single crystal Si substrates. Three parameters were varied: substrate holder bias, substrate temperature, and chamber pressure. Structural properties were studied using x-ray photoelectron spectroscopy, electron and x-ray stimulated Auger electron spectroscopy, and Raman spectroscopy. It was found that high-quality films with about 97of sp3 bonding can be achieved by this deposition technique. Temperature dependencies of conductivity (T = 290 - 650 K) of undoped films and films doped with B and P were studied, and activation energies were determined. A correlation between Ea and the fraction of sp3 bonding was found for undoped films. For doped films Ea depended on doping level. Analysis of the conduction mechanisms and resulting activation energies also requires consideration of electrical activity of the hydrogen in the film, and, probably, other factors.
- Publication:
-
APS March Meeting Abstracts
- Pub Date:
- March 1997
- Bibcode:
- 1997APS..MAR.J2605A