Generation of thermal donors as a result of one- and two-step annealing of silicon crystals with large and small carbon concentrations Babich, V. M. ; Baran, N. P. ; Bugai, A. A. ; Kiritsa, V. L. ; Maksimenko, V. M. Abstract Publication: Semiconductors Pub Date: May 1996 Bibcode: 1996Semic..30..417B