Optical flat surfaces: direct interferometric measurements of small-scale irregularities
Abstract
Some applications of optical surfaces place very stringent limits on small-scale surface irregularities, such as ripples. A method that can be used to make direct interferometric measurements of such small-scale irregularities is described.
- Publication:
-
Optical Engineering
- Pub Date:
- November 1996
- DOI:
- 10.1117/1.601065
- Bibcode:
- 1996OptEn..35.3265H