Ion beam modification for submicron technology
Abstract
Finely focused ion beams with target-current densities of about 100 A/cm 2 are a promising tool for material modification in the nanometer range. A brief outline of the basic source developments will be given as well as some typical examples of nanostructuring of materials.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- June 1996
- DOI:
- 10.1016/0168-583X(95)01321-0
- Bibcode:
- 1996NIMPB.113..154K