Analysis of Ag sbnd Co thin film alloys using PIXE and RBS
Abstract
The Ag sbnd Co system representing a grain type alloy has non-mixing properties resulting in the formation of pure metal precipitates under certain conditions. 50 nm thin layers of Ag 1- xCo x (0.35≤x≤0.55) on SiO 2Si substrates were analysed using microbeam PIXE and RBS to determine whether structural changes following 600°C annealing could be detected. With the aim to estimate the accuracy of proposed analytical techniques the parameters of linear model CiPIXE= f( CiRBS) have been statistically tested. Using a 1 μm beam of 2 MeV protons many random point analyses were carried out on areas ranging from 20 × 20 μm 2 to 2000 ×2000 μm 2. Statistical evaluation of this data shows differences in the Ag/Co yields ratio for annealed as well as non-annealed samples. Lateral concentration inhomogeneity on a scale less than the beam diameter can be observed within a sample according to the analysis of variance based on an F-test of many random point analyses.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- April 1996
- DOI:
- 10.1016/0168-583X(95)00972-8
- Bibcode:
- 1996NIMPB.109..576S