A new computer code for quantitative analysis of low-energy ion scattering data
Abstract
We have developed a computer program for the full analysis of low-energy ion scattering (LEIS) data, i.e. an analysis that is equivalent to the full calculation of the three-dimensional trajectories of beam particles through a number of layers in the solid, and ending in the detector. A dedicated algorithm for this purpose is described, in which part of a trajectory is calculated backwards in time, i.e. starting from the detector. The program gives reliable results, as is proven by the application of the program in the analysis of spectra and azimuthal scans measured for the scattering of 5 keV Ne ions from the (110) face of a Au segregated Ni-0.8at.% Au alloy.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- January 1996
- Bibcode:
- 1996NIMPB.108..173B