High microwave power electron cyclotron resonance etching of III-V semiconductors in CH4/H2/Ar
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- January 1996
- DOI:
- 10.1116/1.589037
- Bibcode:
- 1996JVSTB..14..118P